| Wafer spec |
Mono 156x156mm |
Multi156x156mm |
unit |
| Type |
P/Boron |
P/Boron |
- |
| Wafer Length |
156 +/-0.5 |
156 +/-0.5 |
mm |
| Resistivity |
0.5 ~ 3 |
0.5 ~ 3 |
ohm-cm |
| Diagonal length |
195 or 200 +/-1.0 |
- |
mm |
| Thickness |
200 +30/-20 |
200 +30/-20 |
um |
| Squareness |
90+/-0.3° |
90+/-0.3° |
degree |
| Carbon |
≦ 1E17 |
≦ 8E17 |
atom/cm3 |
| Oxygen |
≦ 1E18 |
≦ 1E18 |
atom/cm3 |
| life time (wafer level) |
As COA |
≧ 0.7 |
us |
| Orientation |
<100> +/-3 ° |
- |
degree |
| TTV |
≦40 |
≦40 |
um |
| Saw mark depth |
≦20 |
≦20 |
um |
| Warpage |
≦60 |
≦60 |
um |
| Crack/holes |
Not allowed |
Not allowed |
- |
| Saw mark |
≦15 |
≦15 |
um |
| Surface defect |
As-cut, cleaned ok, no visible stain |
As-cut, cleaned ok, no visible stain |
- |
| Edge defect |
L≦1.5mm; W≦0.5mm
no V-type chip |
L≦1.5mm; W≦0.5mm
no V-type chip |
- |
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