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‧MOCVD-Epi system　‧SOF-Gas Purification system　‧Drybox and Isolator Glove Systems
 
MOCVD ( 6 x 2 “ )

Products name  : MOCVD (Metal Organic Chemical Vapor Deposition)

Model name  : Marvel series

A Use   : Thin film growth of Gallium Nitride (GaN)

Main composition : Reactor, Gas Delivery System, Electric control parts

Application  : GaN thin film growth for Blue, Green, UV LED and LD

 
Reactor Chamber
 
2 Chamber MOCVD ( customized )

003Products name  : MOCVD (Metal Organic Chemical Vapor Deposition)

003Model name  : Marvel series

003A Use   : Thin film growth of Gallium Nitride (GaN)

003Main composition : Reactor, Gas Delivery System, Electric control parts

003Application  : GaN thin film growth for Blue, Green, UV LED and LD

 
mocvd005
Reactor Chamber
 
Large scale GaN MOCVD ( 72 x 2”, 18 x 4”)

003Products name  : MOCVD (Metal Organic Chemical Vapor Deposition)

003Model name  : Marvel series

003A Use   : Thin film growth of Gallium Nitride (GaN)

003Main composition : Reactor, Gas Delivery System, Electric control parts

003Application  : GaN thin film growth for Blue, Green, UV LED and LD

Reactor Chamber
 
ZnO MOCVD

003Products name  : MOCVD for Zinc Oxide (ZnO)

003Model name  : Zeus series

003A Use   : Thin film growth of ZnO

003Application  : nThin film growth for blue, UV LED and LD

ZnO Epi SEM images
( Sub.: Sapphire )
( Sub.: ZnO/sapphire )
 
 
 
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